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Small Footprint
System cabinet is ivory PVC. It contains the batch tank, the mixing tank, canister tank, four pair of pumps and the electronic components.
Mixing
Slurry, Chemical and DI-water mix in mixing tank. The mix ratio can easily be adjusted by the weight set point in the Touch Screen Controller. The mixing pump mixes slurry.
Delivery
Slurry mix is delivered the recirculation loop which feeds the CMP machines by delivery pump. Unused slurry mix returns to the mixing tank. This recirculation loop makes no slurry particles from setting out of suspension.
Touch Screen Controller
The Touch Screen Controller provides the all status of the system, such as facilities, mix ratio, slurry level of each tank. It also enables the operator to easily change a number of the mix ratio.
Automatic Line Cleaning
Tanks, valves, pumps and slurry lines are cleaned with DI water and nitrogen during periods of non use.
Dual Pump(Option)
Each pump have an extra pump for the system reliability. Controller gets the pump failure signal from sensor, changes the line to extra pump without shutting down production.
Safety Features
･Secondary containment with leak detector
･Door interlock
･DI water shut-off valve
･Slurry level sensor on each tank
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