Product Information

The LCDS system delivers solvent to cleaning process system, resist stripping system, polymer removal system and any system using solvent, in safely and conveniently.

Compact design and layout flexibility The LCDS consists of 1〜4unit depend on number of chemical/solvent Each unit contains 1 or 2 canister Easy operation to change canister Safety interlock such as leak sensor, pressure high/low Use PFA or other non-contaminating material Install with 0.1μm filter for critical process Flexible design for any type of canister, max. 200・tank(optional) Air relief system design for no air mix in chemical/solvent

---

【 ⇒ PRODUCTS INDEX 】

■ Products Information ■ ■Slurry Auto Mixing/Delivery System ■Chemical Auto Dilute and Delivery System ■DI Water Booster Pump System ■Chemical/Solvent Auto Delivery System ■Waste Drain Recovery System ■Silicon Wafer CMP Pad Conditioners