Product Information

The LWRS system recovers waste solvent drain from cleaning process system, resist stripping system, polymer removal system and any system using solvent, in safely and conveniently.

Compact design and layout flexibility The LWRS consists of 1〜4 unit depend on number of waste drain Each unit contains 1 or 2 waste tank Recovers waste drain in automatically by signal from the system via interface cable Flexible design for any type of waste tank Easy operation to change waste tank Safety interlock such as leak sensor, pressure high/lo Use PFA or other non-contaminating material

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【 ⇒ PRODUCTS INDEX 】

■ Products Information ■ ■Slurry Auto Mixing/Delivery System ■Chemical Auto Dilute and Delivery System ■DI Water Booster Pump System ■Chemical/Solvent Auto Delivery System ■Waste Drain Recovery System ■Silicon Wafer CMP Pad Conditioners