Product Information

The LCMS system provides automatic diluting chemicals with D.I.water and delivery to cleaning system.

Compact design and layout flexibility High accurate diluting pump Automatic diluting and delivery for continuous flow The touch screen controller provides the all status of system Use PFA or other non-contaminationing material Various interlock for safety 1 or 2 chemical type

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【 ⇒ PRODUCTS INDEX 】

■ Products Information ■ ■Slurry Auto Mixing/Delivery System ■Chemical Auto Dilute and Delivery System ■DI Water Booster Pump System ■Chemical/Solvent Auto Delivery System ■Waste Drain Recovery System ■Silicon Wafer CMP Pad Conditioners