Product Information

The LBPS system supplies DI Water to semiconductor process equipment in preset pressure.

Compact design and layout flexibility 3 type of standard system depend on flow rate Over 50L/min. flow rate in special order Safety interlock such as leak sensor, pressure high/low Shut off valve is linked with leak sensor High performing pressure sensor and inverter controller can set pressure 0.1kgf/cm2 unit

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■ Products Information ■ ■Slurry Auto Mixing/Delivery System ■Chemical Auto Dilute and Delivery System ■DI Water Booster Pump System ■Chemical/Solvent Auto Delivery System ■Waste Drain Recovery System ■Silicon Wafer CMP Pad Conditioners